Figure 1: Workflow chart of the APS X-ray wavefront sensor, featuring two operation modes: absolute wavefront sensing and relative metrology imaging. A suite of data analysis methods has been developed [Z. Qiao, et al., Opt. Express 28, 33053 (2020), DOI: 10.1364/OE.404606; Z. Qiao, et al., Proc. SPIE 11492, 114920O (2020), DOI: 10.1117/12.2569135; Z. Qiao, et al., Optica 9, 391 (2022), DOI: 10.1364/OPTICA.453748; Z. Qiao, et al., Appl. Phys. Lett. 119, 011105 (2021), DOI: 10.1063/5.0053553]. User software is currently in development and will be released in the future.

Figure 2: 2-D (checkerboard or circular) grating for beamline transverse coherence measurement techniques [S. Marathe, et al., Opt. Express 22, 14041 (2014), DOI: 10.1364/OE.22.014041; X. Shi, et al., Appl. Phys. Lett. 105, 041116 (2014), DOI: 10.1063/1.4892002]. WavePy 2.0 is available for grating interferometry data analysis, supporting single-grating Talbot interferometry for wavefront sensing and Talbot peak scans for transverse coherence and source size measurements.

Figure 3: A portable interferometer (left) for broad-range optics testing and beamline wavefront and coherence measurements, primarily used at the 1-BM beamline but could be deployed at other APS beamlines. It can be operated in multi-modes, including coded-mask-based wavefront sensing, speckle tracking, and grating interferometry. Another compact wavefront sensor (right) is designed as a cost-efficient standard tool adaptable to any beamline.

We support at-wavelength metrology measurements of X-ray optics, including lenses, mirrors, crystals, and windows. A dedicated system for high-speed characterization of lenses is developed, as shown in the figure above. Thousands of lenses designed for the APS-U beamlines have been tested for quality control.