Abstract:
A spin-off company of Osaka University, JTEC Corporation has deployed many tools to fabricate X-ray mirrors with unprecedented surface quality, reaching 1 nm figure error in all spatial frequencies. These tools include EEM, nano-fabrication technology, and RADSI and MSI nano-measurements [1-3]. Since its inception in 2006, JTEC has delivered approximately 1,100 super-precision X-ray mirrors. In this presentation, we will briefly review our current products and the state-of-the-art mirrors we supplied to new generation light sources worldwide. We will also review our lastest development and results in super-polished KB mirrors, Wolter type I [4] and type III [5] mirrors, and deformable mirror assemblies [6,7].

[1] Kazuto Yamauchi et al., Rev. Sci. Instrum. 73, 4028 (2002)
[2] Haruhiko Ohashi et al., J. Phys.: Conf. 425, 052018 (2013)
[3] Hirokatsu Yumoto et al., Nature Photon. 7, 43 (2013)
[4] Satoshi Matsuyama et al., Scientific Reports 7, 46358 (2017)
[5] J. Yamada et al. Opt. Express 27, 3429 (2019)
[6] Yoshio Ichii et al., Rev. Sci. Instrum. 90, 021702 (2019) 
[7] T. Inoue et al., Rev. Sci. Instrum. 92(12), (2021)

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